SPIE Proceedings [SPIE Third International Symposium on...

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SPIE Proceedings [SPIE Third International Symposium on Multispectral Image Processing and Pattern Recognition - Beijing, China (Monday 20 October 2003)] Third International Symposium on Multispectral Image Processing and Pattern Recognition - Study on improvement of resolution in photolithographic patterns with pupil phase-shift filtering

Chen, Xunan, Lu, Hanqing, Zhang, Tianxu, Shi, Jianping, Luo, Xiangang, Kang, Xiqiao, Qin, Tao
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Volume:
5286
Year:
2003
Language:
english
DOI:
10.1117/12.538826
File:
PDF, 335 KB
english, 2003
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