SPIE Proceedings [SPIE Third International Symposium on Multispectral Image Processing and Pattern Recognition - Beijing, China (Monday 20 October 2003)] Third International Symposium on Multispectral Image Processing and Pattern Recognition - Study on improvement of resolution in photolithographic patterns with pupil phase-shift filtering
Chen, Xunan, Lu, Hanqing, Zhang, Tianxu, Shi, Jianping, Luo, Xiangang, Kang, Xiqiao, Qin, TaoVolume:
5286
Year:
2003
Language:
english
DOI:
10.1117/12.538826
File:
PDF, 335 KB
english, 2003