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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Brisbane, Australia (Sunday 11 December 2005)] Device and Process Technologies for Microelectronics, MEMS, and Photonics IV - Patterning frictional differentiation to a polymer surface by atomic force microscopy
Watson, Gregory S., Brown, Christopher L., Myhra, Sverre, Roch, Nicolas C., Hu, Simon, Watson, Jolanta A., Chiao, Jung-Chih, Dzurak, Andrew S., Jagadish, Chennupati, Thiel, David V.Volume:
6037
Year:
2006
Language:
english
DOI:
10.1117/12.638345
File:
PDF, 903 KB
english, 2006