SPIE Proceedings [SPIE SPIE LASE - San Francisco, California, USA (Saturday 22 January 2011)] Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVI - Three-dimensional structuring inside transparent materials by a phase modulated fs laser beam with a LCOS-SLM
Sakakura, Masaaki, Gu, Bo, Hennig, Guido, Miura, Kiyotaka, Sawano, Tsutomu, Xu, Xianfan, Niino, Hiroyuki, Shimotsuma, Yasuhiko, Hirao, KazuyukiVolume:
7920
Year:
2011
Language:
english
DOI:
10.1117/12.881190
File:
PDF, 1.65 MB
english, 2011