SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI - Characterization of a nanocoating using a MEMS tribogauge
Vijayasai, Ashwin, Ramachandran, Gautham, Sivakumar, Ganapathy, Anderson, Charlie, Gale, Richard, Dallas, Tim, García-Blanco, Sonia M., Ramesham, RajeshuniVolume:
8250
Year:
2012
Language:
english
DOI:
10.1117/12.909335
File:
PDF, 951 KB
english, 2012