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SPIE Proceedings [SPIE 1982 Microlithography Conferences - Santa Clara (Friday 1 January 1982)] Optical Microlithography I: Technology for the Mid-1980s - Faithful Pattern Transfer: What Are The Limits In Production?
Bersin, Richard L., Gelernt, Barry, Stover, Harry L.Volume:
334
Year:
1982
Language:
english
DOI:
10.1117/12.933573
File:
PDF, 7.61 MB
english, 1982