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SPIE Proceedings [SPIE OPTCON '88 Conferences--Applications of Optical Engineering - Santa Clara, CA (Tuesday 1 November 1988)] Precision Instrument Design - Kinematic Transmission Design For The Atomic Resolution Measuring Machine (ARMM)
Thurston, Debra L., Slocum, Alexander H., Bristow, Thomas C., Hatheway, Alson E.Volume:
1036
Year:
1989
Language:
english
DOI:
10.1117/12.950974
File:
PDF, 276 KB
english, 1989