[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10,...

  • Main
  • [ECS 211th ECS Meeting - Chicago,...

[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Investigation of Scaling Limits for PECVD SiN and ALD HfO2/Al2O3 Integrated MIM Capacitors

Dornisch, Dieter, Wilk, Glen, Li, Guangming, Ring, Kenneth M M., Howard, David J J., Racanelli, Marco
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2728832
File:
PDF, 500 KB
english, 2007
Conversion to is in progress
Conversion to is failed