![](/img/cover-not-exists.png)
[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Investigation of Scaling Limits for PECVD SiN and ALD HfO2/Al2O3 Integrated MIM Capacitors
Dornisch, Dieter, Wilk, Glen, Li, Guangming, Ring, Kenneth M M., Howard, David J J., Racanelli, MarcoVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2728832
File:
PDF, 500 KB
english, 2007