Zur Darstellung von Trichlorsilan durch Hydrochlorierung...

Zur Darstellung von Trichlorsilan durch Hydrochlorierung von reinem Silicium bei 300–800°C

Claus Fischer, Erich Wolf
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Volume:
333
Year:
1964
Pages:
8
DOI:
10.1002/zaac.19643330108
File:
PDF, 399 KB
1964
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