Spectroscopic Characterization Of RF Hydrocarbon Plasmas For DLC Coatings
Guzmán, F, Ruiz, M, Valderrama, E, Favre, M, Bhuyan, H, Wynham, E S, Chuaqui, HVolume:
511
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/511/1/012017
Date:
May, 2014
File:
PDF, 751 KB
english, 2014