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SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Barrier layer metallization schemes for ULSI technologies
Sandhu, Gurtej S., Meikle, Scott, Kim, Sung, Doan, Trung T., Hoang, Hoang H., Schutz, Ron, Bernstein, Joseph B., Vasquez, BarbaraVolume:
2090
Year:
1993
Language:
english
DOI:
10.1117/12.156530
File:
PDF, 597 KB
english, 1993