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SPIE Proceedings [SPIE Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics: International Workshop - Kiev, Ukraine (Thursday 6 May 1993)] Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Compound material investigation by spectroscopic ellipsometry
Litovchenko, Vladimir G., Frolov, Sergey I., Klyui, Nickolai I., Svechnikov, Sergei V., Valakh, Mikhail Y.Volume:
2113
Year:
1994
Language:
english
DOI:
10.1117/12.191969
File:
PDF, 521 KB
english, 1994