SPIE Proceedings [SPIE Photonics West '97 - San Jose, CA (Saturday 8 February 1997)] Miniaturized Systems with Micro-Optics and Micromechanics II - Optical probe for micromachine performance analysis
Dickey, Fred M., Holswade, Scott C., Smith, Norman F., Miller, Samuel L., Motamedi, M. Edward, Hornbeck, Larry J., Pister, Kristofer S. J.Volume:
3008
Year:
1997
Language:
english
DOI:
10.1117/12.271440
File:
PDF, 633 KB
english, 1997