Investigations on Chemical Vapour Deposition of Magnesium-Boron-Containing Metal-Organic Precursors
Sanjay Mathur, Thomas Rügamer, Holger Braunschweig, Giovanni D'AndolaVolume:
633
Year:
2007
Language:
english
Pages:
4
DOI:
10.1002/zaac.200700368
File:
PDF, 189 KB
english, 2007