Synthesis of a branched photosensitive copolymer and its application for negative-type photoresists
Li, Hu, Liu, Jingcheng, Zheng, Xiangfei, Ji, Changwei, Mu, Qidao, Liu, Ren, Liu, XiaoyaVolume:
133
Language:
english
Journal:
Journal of Applied Polymer Science
DOI:
10.1002/app.42838
Date:
January, 2016
File:
PDF, 742 KB
english, 2016