ChemInform Abstract: Physical and Chemical Nature of Films Formed on Si(100) Surfaces Subjected to C2H4 at Elevated Temperatures.
KIM, H. J., DAVIS, R. F., COX, X. B., LINTON, R. W.Volume:
18
Journal:
ChemInform
DOI:
10.1002/chin.198751370
Date:
December, 1987
File:
PDF, 148 KB
1987