ChemInform Abstract: High Quality Al2O3 Thin Films Prepared by a Novel Two-Step Evaporation Process.
SARAIE, J., GOTO, S., KITAO, Y., YODOGAWA, Y.Volume:
19
Journal:
ChemInform
DOI:
10.1002/chin.198809389
Date:
March, 1988
File:
PDF, 140 KB
1988