CVD Deposited Titania Thin Films for Gas Sensors with...

Chemical Vapor Deposition 2015 / 12 Vol. 21; Iss. 10-11-12

CVD Deposited Titania Thin Films for Gas Sensors with Improved Operating Characteristics

Baryshnikova, Marina V., Filatov, Leonid A., Petrov, Andrey S., Alexandrov, Sergey E.
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Volume:
21
Language:
english
Journal:
Chemical Vapor Deposition
DOI:
10.1002/cvde.201507187
Date:
December, 2015
File:
PDF, 4.93 MB
english, 2015
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