![](/img/cover-not-exists.png)
Surface passivation for ultrathin Al 2 O 3 layers grown at low temperature by thermal atomic layer deposition
Frascaroli, J., Seguini, G., Cianci, E., Saynova, D., van Roosmalen, J., Perego, M.Volume:
210
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201200568
Date:
April, 2013
File:
PDF, 398 KB
english, 2013