Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes
Yang, Mengdi, Aarnink, Antonius A. I., Kovalgin, Alexey Y., Wolters, Rob A. M., Schmitz, JurriaanVolume:
212
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201532305
Date:
July, 2015
File:
PDF, 670 KB
english, 2015