Growth and impurity characterization of AlN on (0001) sapphire grown by spatially pulsed MOCVD
Chung, Roy B., Rodak, Lee E., Enck, Ryan W., Sampath, Anand V., Wraback, Michael, Reed, Meredith L.Volume:
213
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201532571
Date:
April, 2016
File:
PDF, 636 KB
english, 2016