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Effect of SiC-on-Si template residual stress on GaN residual stress and crystal quality
Chai, Jessica, Walker, Glenn, Wang, Li, Massoubre, David, Iacopi, AlanVolume:
253
Language:
english
Journal:
physica status solidi (b)
DOI:
10.1002/pssb.201552626
Date:
May, 2016
File:
PDF, 560 KB
english, 2016