Technological possibilities of Si:H thin film deposition...

Physica status solidi 2013 / 12 Vol. 10; Iss. 12

Technological possibilities of Si:H thin film deposition with embedded cubic Mg 2 Si nanoparticles

Galkin, Nikolay G., Galkin, Konstantin N., Chernev, Igor M., Fajgar, Radek, Stuchlikova, The Ha, Remes, Zdenek, Stuchlik, Jiri
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Volume:
10
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201300362
Date:
December, 2013
File:
PDF, 577 KB
english, 2013
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