Gaseous ternary chromium-aluminium complexes as precursor...

Gaseous ternary chromium-aluminium complexes as precursor for chemical vapour deposition

Lessiak, Mario, Haubner, Roland, Pitonak, Reinhard, Köpf, Arno, Weissenbacher, Ronald
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201510007
Date:
July, 2015
File:
PDF, 316 KB
english, 2015
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