Effect of substrate temperature on initiated plasma...

Physica status solidi 2015 / 07 Vol. 12; Iss. 7

Effect of substrate temperature on initiated plasma enhanced chemical vapor deposition of PHEMA thin films

Gürsoy, Mehmet, Karaman, Mustafa
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201510034
Date:
July, 2015
File:
PDF, 603 KB
english, 2015
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