A calculation method of deposition profiles in chemical...

Physica status solidi 2015 / 07 Vol. 12; Iss. 7

A calculation method of deposition profiles in chemical vapor deposition reactors using bio-inspired algorithms

Takahashi, Takahiro, Inagaki, Taeka, Nariai, Shingo, Kodama, Junichi, Arakawa, Masamoto, Ema, Yoshinori
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Volume:
12
Language:
english
Journal:
physica status solidi (c)
DOI:
10.1002/pssc.201510056
Date:
July, 2015
File:
PDF, 332 KB
english, 2015
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