71.1: High Throughput and Scalable Spatial Atomic Layer...

SID Symposium Digest of Technical Papers 2015 / 06 Vol. 46; Iss. 1

71.1: High Throughput and Scalable Spatial Atomic Layer Deposition of Al 2 O 3 as a Moisture Barrier for Flexible OLED Display

Choi, Hagyoung, Shin, Seokyooon, Choi, Yonghyuk, Choi, Yeongtae, Kim, Junghun, Kim, Sanghun, Kim, Hyungkyu, Park, Jongsik, Chung, Seog Chul, Jeon, Hyeongtag, Oh, Kiyoung
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Volume:
46
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.10378
Date:
June, 2015
File:
PDF, 1.04 MB
english, 2015
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