21.1: Invited Paper : High...

SID Symposium Digest of Technical Papers 2015 / 06 Vol. 46; Iss. 1

21.1: Invited Paper : High Throughput MOTFT with Organic Etch-Stopper and SiNx Gate Insulator

Yu, Gang, Shieh, Chan-Long, Xiao, Tian, Lee, Karman, Foong, Fatt, Wang, Guangming, Musolf, Juergen, Chen, Zhao, Chang, Frankie, Ottosson, Kristoffer, Park, Jung-Woo, Chen, Jason, Li, Chen-Yue
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Volume:
46
Language:
english
Journal:
SID Symposium Digest of Technical Papers
DOI:
10.1002/sdtp.10472
Date:
June, 2015
File:
PDF, 1.09 MB
english, 2015
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