Analysis technique for ultra shallow junction using medium...

Surface and Interface Analysis 2014 / 12 Vol. 46; Iss. 12-13

Analysis technique for ultra shallow junction using medium energy ion scattering time-of-flight elastic recoil detection analysis

Abo, Satoshi, Pei, Ri, Yuan, Yao Xin, Wakaya, Fujio, Takai, Mikio
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
46
Language:
english
Journal:
Surface and Interface Analysis
DOI:
10.1002/sia.5590
Date:
December, 2014
File:
PDF, 654 KB
english, 2014
Conversion to is in progress
Conversion to is failed