Synthesis, Characterization, Thermal Property of Si(c-C 5 H 9 NH) 4 and Its Potential as CVD Precursor for SiC Film
Du, Liyong, Chu, Wenxiang, Miao, Hongyan, Wang, Dawei, Xu, Chongying, Ding, YuqiangVolume:
641
Language:
english
Journal:
Zeitschrift für anorganische und allgemeine Chemie
DOI:
10.1002/zaac.201500143
Date:
August, 2015
File:
PDF, 499 KB
english, 2015