Influence of processing conditions on hillock formation in electron-beam evaporated platinum/titanium films
Eichorst, Dennis J., Blanton, Thomas N., Barnes, Craig L., Bosworth, Lloyd A.Volume:
4
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584589408017027
Date:
May, 1994
File:
PDF, 912 KB
english, 1994