Fluid simulation of inductively coupled Ar/O...

Chinese Physics B 2015 / 09 Vol. 24; Iss. 9

Fluid simulation of inductively coupled Ar/O 2 plasmas: Comparisons with experiment

Wang, Yan-Hui, Wei, Liu, Zhang, Yu-Ru, Wang, You-Nian
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/24/9/095203
Date:
September, 2015
File:
PDF, 535 KB
english, 2015
Conversion to is in progress
Conversion to is failed