Influence of the rapid thermal annealing on the properties...

Journal of Physics Conference Series 2008 / 05 Vol. 113

Influence of the rapid thermal annealing on the properties of a-C:H/c-Si structures

Georgiev, S, Szekeres, A, Vlaikova, E, Beshkov, G, Sueva, D, Manolov, E
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Volume:
113
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/113/1/012013
Date:
May, 2008
File:
PDF, 531 KB
english, 2008
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