High mechanical Q-factor measurements on silicon bulk...

Journal of Physics Conference Series 2008 / 07 Vol. 122

High mechanical Q-factor measurements on silicon bulk samples

Nawrodt, R, Zimmer, A, Koettig, T, Schwarz, C, Heinert, D, Hudl, M, Neubert, R, Thürk, M, Nietzsche, S, Vodel, W, Seidel, P, Tünnermann, A
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Volume:
122
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/122/1/012008
Date:
July, 2008
File:
PDF, 398 KB
english, 2008
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