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Silicon wafer characterisation by laser ultrasonics and neural networks
Lefèvre, F, Jenot, F, Ouaftouh, M, Duquennoy, M, Ourak, MVolume:
214
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/214/1/012042
Date:
March, 2010
File:
PDF, 1.14 MB
english, 2010