Simulation and experimental studies of an uncooled MEMS...

Journal of Physics Conference Series 2006 / 04 Vol. 34

Simulation and experimental studies of an uncooled MEMS capacitive infrared detector for thermal imaging

Wang, Weidong, Upadhyay, Vandana, Bumgarner, John, Edwards, Oliver
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Volume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/057
Date:
April, 2006
File:
PDF, 343 KB
english, 2006
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