Fabrication of capacitive absolute pressure sensor using...

Journal of Physics Conference Series 2006 / 04 Vol. 34

Fabrication of capacitive absolute pressure sensor using Si-Au eutectic bonding in SOI wafer

Lee, Kang Ryeol, Kim, Kunnyun, Park, Hyo-Derk, Kim, Yong Kook, Choi, Seung-Woo, Choi, Woo-Beom
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Volume:
34
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/34/1/064
Date:
April, 2006
File:
PDF, 238 KB
english, 2006
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