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Optimization of copper electroplating process applied for microfabrication on flexible polyethylene terephthalate substrate
Le, Nguyen Ngan, Hue Phan, Thi Cam, Le, Anh Duy, Dung Dang, Thi My, Dang, Mau ChienVolume:
6
Language:
english
Journal:
Advances in Natural Sciences: Nanoscience and Nanotechnology
DOI:
10.1088/2043-6262/6/3/035007
Date:
May, 2015
File:
PDF, 1.25 MB
english, 2015