Parameters affecting the sensitivity of LTCC pressure...

Parameters affecting the sensitivity of LTCC pressure sensors

Radosavljević, Goran J., Smetana, Walter, Marić, Andrea M., Živanov, Ljiljana D., Unger, Michael, Stangl, Günther
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Volume:
27
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/13565361011061975
Date:
August, 2010
File:
PDF, 392 KB
english, 2010
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