Silicon pressure sensors with a thick film periphery

Microelectronics International 1998 / 12 Vol. 15; Iss. 3

Silicon pressure sensors with a thick film periphery

Belavič, Darko, Šoba, Stojan, Pavlin, Marko, Ročak, Dubravka, Hrovat, Marko
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Volume:
15
Language:
english
Journal:
Microelectronics International
DOI:
10.1108/13565369810233122
Date:
December, 1998
File:
PDF, 183 KB
english, 1998
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