The integration of shop floor control in wafer fabrication

The integration of shop floor control in wafer fabrication

Hsu, S.Y., Sha, D.Y.
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Volume:
18
Language:
english
Journal:
Journal of Manufacturing Technology Management
DOI:
10.1108/17410380710752680
Date:
June, 2007
File:
PDF, 211 KB
english, 2007
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