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[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - HRXRD for in-line monitoring of advanced FD-SOI technology: Use-cases: AM: Advanced metrology
Le Cunff, D., Duru, R., Durand, A., Pernot, F., Wormington, M., Tokar, A., Rouchon, D., Gergaud, P.Year:
2016
Language:
english
DOI:
10.1109/asmc.2016.7491100
File:
PDF, 749 KB
english, 2016