[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Modeling the variance of the durations of maintenance activities in semiconductor fabs
Regev, Itai, Parmet, Yisrael, Benson-Karhi, DiamantaYear:
2016
Language:
english
DOI:
10.1109/asmc.2016.7491111
File:
PDF, 278 KB
english, 2016