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[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - STI 28nm pitch guided DSA to enable the 450mm tools qualification and transition
Larrea, Anne-Sophie, Dunn, Shannon, Collison, Wenli, Franca, Daniel, Borst, Christopher, Lee, Janghee, Lim, JongHeun J H, Chang, StockYear:
2016
Language:
english
DOI:
10.1109/asmc.2016.7491134
File:
PDF, 745 KB
english, 2016