[IEEE Conference Record of the Twenty-Ninth IEEE...

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[IEEE Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference 2002 - New Orleans, LA, USA (19-24 May 2002)] Conference Record of the Twenty-Ninth IEEE Photovoltaic Specialists Conference, 2002. - Investigation on the role of oxygen in μc-Si:H thin film and its deposition process with VHF-PECVD

Huidong Yang,, Chunya Wu,, Yaohua Mai,, Hongbo Li,, Yan Li,, Xinhua Geng,, Ying Zhao,, Shaozhen Xiong,
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Year:
2002
Language:
english
DOI:
10.1109/pvsc.2002.1190838
File:
PDF, 234 KB
english, 2002
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