![](/img/cover-not-exists.png)
[IEEE 2010 International Semiconductor Conference (CAS 2010) - Sinaia (2010.10.11-2010.10.13)] CAS 2010 Proceedings (International Semiconductor Conference) - Micromachining and nanoprocessing of GaN/Silicon for SAW and UV photodetector manufacturing
Müller, A, Konstantinidis, G, Neculoiu, D, Dinescu, A, Andrulidaki, M, Stavrinidis, A, Cismaru, A, Stefanescu, A, Carp, M, Anton, C, Müller, A A, Gavrila, R, Dascalu, DYear:
2010
Language:
english
DOI:
10.1109/smicnd.2010.5650290
File:
PDF, 866 KB
english, 2010