SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III - Optimization of low-voltage electron optics
Hordon, Laurence S., Huang, Zhirong, Browning, Raymond, Maluf, Nadim I., Pease, Roger Fabian W., Patterson, David O.Volume:
1924
Year:
1993
Language:
english
DOI:
10.1117/12.146530
File:
PDF, 455 KB
english, 1993