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SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Effects of ILD thickness and slope-etch depth on via performance and metal filling characteristics
Grynkewich, Gregory W., Freeman, John L., Morrow, Wayne K., Wang, Ping, Woodburn, Robert, Hoang, Hoang H., Schutz, Ron, Bernstein, Joseph B., Vasquez, BarbaraVolume:
2090
Year:
1993
Language:
english
DOI:
10.1117/12.156532
File:
PDF, 595 KB
english, 1993