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SPIE Proceedings [SPIE International Symposium on Precision Engineering Measurement and Instrumentation 2012 - Chengdu, China (Wednesday 8 August 2012)] Eighth International Symposium on Precision Engineering Measurement and Instrumentation - Characteristic evaluation and experimental analysis of the ultrahigh precision three-dimensional scanning probe
Liu, Shuai, Xue, Zi, Ye, Shu-liang, Hou, Dexin, Wang, He-yan, Lin, JieVolume:
8759
Year:
2013
Language:
english
DOI:
10.1117/12.2014564
File:
PDF, 520 KB
english, 2013