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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Polarization Science and Remote Sensing VI - Real-time combined reflection and transmission ellipsometry for film-substrate systems
Elshazly-Zaghloul, M., Shaw, Joseph A., LeMaster, Daniel A.Volume:
8873
Year:
2013
Language:
english
DOI:
10.1117/12.2024979
File:
PDF, 133 KB
english, 2013