SPIE Proceedings [SPIE International Conference on Optical Instruments and Technology (OIT2013) - Beijing, China (Sunday 17 November 2013)] 2013 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems - Design and analysis of multi-electrodes distribution for shaping of electrostatic stretched membrane mirror
Jiang, Long-jun, Wei, Xiao-ru, Yang, Bin, Tang, Min-xue, Tam, Hwa-Yaw, Xu, Kexin, Xiao, Hai, Zhu, Jigui, Zhao, Chun-LiuVolume:
9046
Year:
2013
Language:
english
DOI:
10.1117/12.2034662
File:
PDF, 538 KB
english, 2013